PROBE GUIDE PLATE, SEMICONDUCTOR INSPECTION APPARATUS AND METHOD OF MANUFACTURING PROBE GUIDE PLATE

摘要

Provided is a probe guiding plate used for a semiconductor testing device which inputs or outputs an electric signal to test a target object through a probe needle includes: a silicone substrate on which a through hole into which the probe needle is inserted from one surface to the other surface is formed; and a silicone oxide layer. The through hole includes: a taper unit which is placed at the end of the firstly-mentioned surface and of which the size increase as getting closer to the firstly-mentioned surface; and a second taper unit which is placed at the end of the secondly-mentioned surface and of which the size increases as getting closer to the secondly-mentioned surface. The silicone oxide layer is formed on the inner wall surface of the through hole which includes the first and the second taper unit.