CATADIOPTRIC PROJECTION OBJECTIVE WITH TILTED DEFLECTING MIRRORS, PROJECTION EXPOSURE APPARATUS, PROJECTION EXPOSURE METHOD, AND MIRROR

摘要

PROBLEM TO BE SOLVED: To provide a catadioptric projection objective that has tilted deflecting mirrors which allow imaging of patterns including sub-patterns oriented in various directions.SOLUTION: As to a first deflecting mirror having a first reflective coating with a reflectivity R(α) for s-polarized light and a reflectivity R(α) for p-polarized light both incident at a first angle of incidenceαaccording to (t-Δα)≤α<(t+Δα), and a second deflecting mirror having a second reflective coating with a reflectivity R(α) for s-polarized light and a reflectivity R(α) for p-polarized light both incident at a second angle of incidenceαaccording to (t-Δα)≤α≤(t+Δα), a first reflectivity sum Rfor s-polarized light of polar edge rays accumulated upon reflection on them is substantially equal to a second reflectivity sum Rfor p-polarized light of equatorial edge rays accumulated upon reflection.