HEATING VAPORIZATION SYSTEM AND HEATING VAPORIZATION METHOD

摘要

A heating vaporization system provided with: a container that heats and vaporizes a source to produce source gas; a pipe for leading out the source gas; a sensor flow path that is provided in the pipe; a flow rate detecting part that is provided with a thermal type flow rate sensor provided in the sensor flow path, and measures a flow rate of the source gas flowing through the pipe; a flow rate regulating part that regulates the flow rate of the source gas flowing through the pipe located upstream of the flow rate detecting part; and a control part that uses a result of the detection by the flow rate detecting part to control the flow rate regulating part.

主权项

1. A heating vaporization system comprising:
a container that contains a source, and heats and vaporizes the source to produce source gas; a pipe that is connected to the container to lead out the source gas produced in the container; a sensor flow path that is provided in the pipe; a flow rate detecting part that comprises a thermal type flow rate sensor provided in the sensor flow path, and measures a flow rate of the source gas flowing through the pipe; a flow rate regulating part that is provided upstream of the flow rate detecting part to regulate the flow rate of the source gas flowing through the pipe; and a control part that uses a result of the measurement by the flow rate detecting part to control the flow rate regulating part.