METHOD OF FABRICATING A NEEDLE FOR PROBE CARD AND THE SAME THEREOF
摘要
<p>The present invention relates to a method for fabricating a needle for a probe card. The purpose of the present invention is to facilitate the method for fabricating a needle for a probe card and to provide a simplified process. The method for fabricating a needle for a probe card according to an embodiment of the present invention comprises the following steps of: preparing a metal substrate whose surface is processed; patterning a photoresist on the substrate; forming a metal plated layer on a region where the photoresist has not been patterned using electroplating; removing the photoresist after forming the metal plated layer; coating a photosensitive film on the substrate and the metal plated layer after the photoresist; applying tape on the photosensitive film; and detaching the substrate.</p>
申请公布号
KR101465343(B1)
申请公布日期
2014.12.04
申请号
KR20130071436
申请日期
2013.06.21
申请人
RESEARCH & BUSINESS FOUNDATION SUNGKYUNKWAN UNIVERSITY
发明人
SUH, SU JEONG;CHO, YOUNG LAE;KIM, JIN SOO;KIM, TAE YOO