| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate with a transparent conductive film provided with an appropriate irregularity (texture structure), for each photoelectric conversion unit which comprises various laminate structures constituting a solar cell. SOLUTION: In a substrate with a transparent conductive film of the present invention, a transparent conductive film 4 comprising ZnO as a basic configuration is formed on a transparent substrate 2. The transparent conductive film is an aggregate of crystal grains 4a having a figure extending in the film thickness direction while an interface 4b is present between grains of the crystal grains at least in the film thickness direction, and has a fine irregularity on a surface thereof. COPYRIGHT: (C)2012,JPO&INPIT |
