发明名称 半導体装置の製造方法およびそれを用いてなる半導体装置、並びに電気、電子部品の製造方法およびそれを用いてなる電気、電子部品
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing a semiconductor device which has superior productivity without a flax washing process, and can reduce warpage caused by grinding a back surface of a semiconductor wafer, and the semiconductor device manufactured by using the same. SOLUTION: A method for manufacturing a semiconductor device comprises a first step for forming a resin composition layer with a flux function and a back grind tape on a circuit surface of a semiconductor wafer where a first connecting electrode is provided thereon, in this order; a second step for grinding an opposing surface to the circuit surface of the semiconductor wafer; a third step for laminating a dicing tape on the opposing surface to the circuit surface of the semiconductor wafer; a forth step for peeling off the back grind tape; a fifth step for dividing the resin composition layer with the flux function and the semiconductor wafer into pieces to obtain a semiconductor chip having the resin composition layer with the flux function; and additional two steps. COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP5633214(B2) 申请公布日期 2014.12.03
申请号 JP20100152933 申请日期 2010.07.05
申请人 发明人
分类号 H01L21/60;H01L21/301;H01L21/304;H01L23/29;H01L23/31 主分类号 H01L21/60
代理机构 代理人
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