| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for producing trichlorosilane, in which the temperature distribution in a reaction chamber is made uniform, so as to heat a gas being supplied with a higher heat efficiency, and which can be upsized without impairing heat efficiency and allows mass production. SOLUTION: The apparatus for producing trichlorosilane includes: a nearly cylindrical reaction chamber to which a raw gas is supplied from a lower part and which generates a reaction gas; a plurality of heaters being disposed in the reaction chamber and heating the raw gas; and a plurality of electrodes being connected to lower ends of these heaters and fixed to a bottom plate of the reaction chamber. Each heater has a couple of non-heat generating sections fixed to a couple of electrodes and a heat generating section which is attached to the non-heat generating sections and generates heat when supplied with electricity. The heat generating section has a plate-like first heating element which extends upward from the non-heat generating section to connect between the couple of non-heat generating sections and a plate-like second heating element which has a height lower than that of the first heating element and extends upward from the non-heat generating section to connect between the couple of non-heat generating sections. COPYRIGHT: (C)2011,JPO&INPIT |
