| 发明名称 |
Method of switching magnetic flux distribution |
| 摘要 |
In a method of switching magnet flux distribution, a magnet is arranged on a rear side of a backing plate with respect to a target holding side thereof in a magnetron sputtering cathode, and placing an article that exhibits ferromagnetism at room temperature on the target holding side of the backing plate or removing the article therefrom so that the magnet flux distribution is switched between a balanced distribution of the magnetic flux and unbalanced distribution of the magnetic flux. |
| 申请公布号 |
US8900419(B2) |
申请公布日期 |
2014.12.02 |
| 申请号 |
US201313790412 |
申请日期 |
2013.03.08 |
| 申请人 |
National Institute for Materials Science |
发明人 |
Kamei Masayuki;Ishigaki Takamasa |
| 分类号 |
C23C14/35;C23C14/08;H01J37/34;B01J37/34;B01J35/00;B01J21/06 |
主分类号 |
C23C14/35 |
| 代理机构 |
|
代理人 |
Kanesaka Manabu |
| 主权项 |
1. A method of switching magnetic flux distribution, comprising:
arranging a magnet on a rear side of a backing plate with respect to a target holding side thereof in a magnetron sputtering cathode, placing an article that exhibits ferromagnetism at room temperature on the target holding side of the backing plate, and removing the article therefrom, thereby switching the magnetic flux distribution between a balanced distribution of the magnetic flux and an unbalanced distribution of the magnetic flux, wherein, after the article that exhibits ferromagnetism at the room temperature is removed, an article that does not exhibit ferromagnetism at the room temperature is placed. |
| 地址 |
Tsukuba-Shi JP |
