发明名称 SILVER-BASED CYLINDRICAL TARGET AND PROCESS FOR MANUFACTURING SAME
摘要 A silver-based cylindrical target is provided. The target consists of silver or a single-phase silver alloy in which an additive component is solid-soluted, wherein a ratio A/B is 0.8-1.2, A being a diameter of crystal grains in a direction along a central axis of a cylinder in a cross section including the central axis of the cylinder; and B being a diameter of crystal grains in a direction perpendicular to the central axis, an oxygen content is 100 ppm or less, and a content of non-metallic inclusions is 20 ppm or less.
申请公布号 KR101467152(B1) 申请公布日期 2014.11.28
申请号 KR20147004114 申请日期 2012.11.14
申请人 发明人
分类号 B21C1/00;B21C23/00;B21C23/08;C22C5/06;C22F1/14;C23C14/34;H01L51/56 主分类号 B21C1/00
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