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发明名称
Probe card pin examination system and apparatus and method
摘要
申请公布号
KR101465589(B1)
申请公布日期
2014.11.27
申请号
KR20130055329
申请日期
2013.05.15
申请人
发明人
分类号
G01R1/067;G01R31/02;H01L21/66
主分类号
G01R1/067
代理机构
代理人
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地址
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