SENSOR MODULE AND PACKET RELAY APPARATUS WITH DAISY CHAIN

摘要

The present invention relates to a semiconductor sensor module and a packet transmission device based on a daisy chain connection, wherein the packet transmission device enables each sensor module, which receives data from a sensor used in a semiconductor manufacturing process, to be connected in a daisy chain and transmits an Ethernet packet from one side to the other side. The semiconductor sensor module comprises: a sensor interface part that is connected to various sensors used in a semiconductor manufacturing process and receives sensor data collected by the sensors; a network relay part that relays an Ethernet packet, which is inputted from the outside through a daisy chain connection, to the other side; and an Ethernet packet generation part that generates an Ethernet packet to transmit the sensor data to the outside.