Turbomolecular pump, and particle trap for turbomolecular pump

摘要

A turbomolecular pump includes: a rotor (30) formed with rotating blades (32) in a plurality of stages, and rotating at high speed; a plurality of fixed blades (33) arranged along axial direction of the pump so as to alternate with respect to the rotating blades (32); a pump housing (34) containing the rotating blades (32) and the fixed blades (33), and formed with an inlet opening (21a); a circular disk (150), provided close to the inlet opening of the rotor (30), and arranged so as to oppose a surface of the rotor (30) radially inward than a root portion of the rotating blades; and a cylindrical mesh structure (153a, 153b), disposed between the inlet opening (21a) and the rotor (30), and made by interlacing fine wires. Particles that strike the rotor and bounce off are captured internally in the mesh structure (153a, 153b).

主权项

1. A turbomolecular pump, comprising:
a rotor formed with rotating blades in a plurality of stages, and rotating at high speed; a plurality of fixed blades arranged along axial direction of the pump so as to alternate with respect to the rotating blades; a pump housing containing the rotating blades and the fixed blades, and formed with an inlet opening; a circular disk, provided close to the rotor on the inlet opening side, and arranged so as to oppose a surface on the rotor more radially inward than a root portion of the rotating blades; a cylindrical mesh structure, disposed between the inlet opening and the rotor, and made by interlacing fine wires; and a plurality of plate shaped mesh structures disposed so as to extend radially with respect to the cylindrical mesh structure, and provided perpendicularly to a plane of the pump inlet opening, wherein particles that are struck by the rotor and bounce off it are captured internally in the cylindrical mesh structure.