| 发明名称 |
SYSTEM AND METHOD FOR IMPROVING THE ACCURACY OF A RATE OF DECAY MEASUREMENT FOR REAL TIME CORRECTION IN A MASS FLOW CONTROLLER OR MASS FLOW METER BY USING A THERMAL MODEL TO MINIMIZE THERMALLY INDUCED ERROR IN THE ROD MEASUREMENT |
| 摘要 |
<p>The disclosed embodiments include a method, apparatus, and computer program product for improving the accuracy of a rate of decay measurement for real time correction in a mass flow controller or mass flow meter by using a thermal model to minimize thermally induced error in the rate of decay measurement.</p> |
| 申请公布号 |
KR20140135185(A) |
申请公布日期 |
2014.11.25 |
| 申请号 |
KR20147025108 |
申请日期 |
2013.03.04 |
| 申请人 |
ILLINOIS TOOL WORKS INC. |
发明人 |
KEHOE ANTHONY;BANARES BERWIN;ELLEC CHRIS;LULL JOHN;VALENTINE WILLIAM |
| 分类号 |
G05D7/06;G01F1/68;G01F15/06;G01F25/00 |
主分类号 |
G05D7/06 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
