发明名称 COPPER FILM-FORMING COMPOSITION, AND METHOD FOR PRODUCING COPPER FILM BY USING THE COMPOSITION
摘要 <p>Provided is a copper film-forming composition, which is in the form of a solution and can obtain a copper film having sufficient electrical conductivity when heated at a relatively low temperature. This copper film-forming composition contains 0.01 to 3.0 mol/kg of copper formate or its hydrate, 0.01 to 3.0 mol/kg of copper acetate or its hydrate, at least one diol compound selected from a group of diols of formula (1) and diols of formula (1'), a piperidine compound of formula (2), and an organic solvent. When a content of the copper formate or its hydrate is assumed to be 1 mol/kg, the diol compound is contained in a range of 0.1 to 6.0 mol/kg and the piperidine compound is contained in a range of 0.1 to 6.0 mol/kg.</p>
申请公布号 KR20140134320(A) 申请公布日期 2014.11.21
申请号 KR20147028335 申请日期 2013.02.21
申请人 ADEKA CORPORATION 发明人 ABE TETSUJI
分类号 C23C18/08 主分类号 C23C18/08
代理机构 代理人
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