HYDROGEN SENSOR BASED ON ZINC OXIDE AND METHOD OF FABRICATING THE SAME

摘要

The present invention relates to a hydrogen sensor based on zinc oxide and a method for manufacturing the same. The present invention provides the hydrogen sensor capable of detecting a low concentration of hydrogen gas; having short response time and recovery time; and having long-term stability. According to the present invention, the hydrogen sensor comprises: a substrate; a zinc oxide nanorod formed on the substrate, and where palladium nanoparticles are deposited on the surface; and an electrode arranged in the upper or lower predetermined position of the zinc oxide nanorod. According to the present invention, the method for manufacturing the hydrogen sensor comprises: step (a) of preparing the substrate; (b) step of forming a zinc oxide seed layer by using zinc oxide solution on the upper part of the substrate; step (c) of growing the zinc oxide nanorod on the zinc oxide seed layer by a thermal method; step (d) of arranging the electrode on the upper part or the lower part of the grown zinc oxide nanorod; and step (e) of depositing the palladium nanoparticles on the zinc oxide nanorod.