REDUCED CAPACITY CARRIER TRANSPORTING BODY, LOAD PORT, AND BUFFER SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor work-piece processing system.SOLUTION: A semiconductor work-piece processing system comprises: at least one processing apparatus for processing work-pieces; a first transport system; a second transport system; and one or more interfaces between the first transport system and the second transport system. Each of The first transport system and the second transport system comprises one or more sections having substantially constant velocity and communicates with constant velocity sections in queue sections.