发明名称 |
QUATERNARY AMMONIUM HYDROXIDE COMPOUND AND METHOD OF PRODUCING THE SAME, WAFER CLEANING COMPOSITION AND WAFER CLEANING METHOD |
摘要 |
PROBLEM TO BE SOLVED: To provide a novel quaternary ammonium hydroxide compound suitable for wafer cleaning.SOLUTION: This invention relates to a quaternary ammonium hydroxide compound represented by a compound of the following formula. |
申请公布号 |
JP2014218459(A) |
申请公布日期 |
2014.11.20 |
申请号 |
JP20130098502 |
申请日期 |
2013.05.08 |
申请人 |
SHIN ETSU CHEM CO LTD |
发明人 |
YANAGISAWA HIDEYOSHI |
分类号 |
C07D487/08;C11D7/32;H01L21/304 |
主分类号 |
C07D487/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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