LIQUID ION DETECTOR

摘要

A system and method comprising a liquid interface with an electrode. The electrode may be coupled to a MEMS-based electrometer for sensing small amounts of charge imposed on the electrode. In some embodiments ion exchangers may be employed to provide for specific selectivity for certain ions or molecules. The electrometer may include a comb drive actuator coupled to a moving shuttle supported on flexures.

主权项

1. A device comprising:
a chamber, said chamber having a hollow center with an entrance and an exit; an electrode, said electrode partially disposed in the hollow center, and a MEMS electrometer, said electrometer coupled to the electrode.