SUBSTRATE SEPARATION APPARATUS AND METHOD

摘要

An apparatus for separating a first substrate and a second substrate which are in contact with each other, includes an upper transfer part which fixes the first substrate and transfers the first substrate in a positive X-axis direction in an XY coordinate system comprised of an X axis and an Y axis which perpendicularly intersect each other and a lower transfer part which is disposed under the upper transfer part with a gap therebetween and fixes and transfers the second substrate, wherein the lower transfer part comprises a first transfer section which transfers the second substrate in the positive X-axis direction, and a second transfer section which transfers the second substrate in the positive X-axis direction as well as a negative Y-axis direction.

主权项

1. A method of separating a first substrate and a second substrate which are in contact with each other, the method comprising:
fixing a bottom surface of the second substrate and a top surface of the first substrate; transferring, in a first area, the first substrate and the second substrate in a positive X-axis direction in an XY coordinate system comprised of an X axis and an Y axis which perpendicularly intersect each other; and separating the first substrate and the second substrate in a second area by transferring the first substrate in the positive X-axis direction at the same time as transferring the second substrate in the positive X-axis direction and a negative Y-axis direction.