发明名称 COMPUTATION APPARATUS, PROGRAM, AND IMAGE PICKUP SYSTEM
摘要 A computation apparatus that calculates information of a subject includes: a calculation unit configured to calculate a spatial distribution of a first first-order phase value, a spatial distribution of a second first-order phase value, and a spatial distribution of a first-order measurement target value, by using the subject data; a calculation unit configured to calculate an error correction function including the first first-order phase value and the second first-order phase value as variables, by using information of the spatial distribution of the first first-order phase value, information of the spatial distribution of the second first-order phase value, and information of the spatial distribution of the first-order measurement target value; and a calculation unit configured to calculate information of a spatial distribution of a second-order measurement target value, corresponding to a spatial distribution obtained by correcting the spatial distribution of the first-order measurement target value.
申请公布号 US2014341335(A1) 申请公布日期 2014.11.20
申请号 US201414276902 申请日期 2014.05.13
申请人 CANON KABUSHIKI KAISHA 发明人 Handa Soichiro
分类号 G01T1/17;G01N23/20;G01T1/16 主分类号 G01T1/17
代理机构 代理人
主权项 1. A computation apparatus that calculates information of a subject by using subject data, wherein the subject data is information of a periodic pattern formed by light that has been modulated by the subject, and wherein the periodic pattern has periods in a first direction and a second direction, the computation apparatus comprising: a calculation unit configured to calculate a spatial distribution of a first first-order phase value corresponding to a phase value of the periodic pattern related to the first direction, a spatial distribution of a second first-order phase value corresponding to a phase value of the periodic pattern related to the second direction, and a spatial distribution of a first-order measurement target value, by using the subject data; a calculation unit configured to calculate an error correction function, including the first first-order phase value and the second first-order phase value as variables, by using information of the spatial distribution of the first first-order phase value, information of the spatial distribution of the second first-order phase value, and information of the spatial distribution of the first-order measurement target value; and a calculation unit configured to calculate information of a spatial distribution of a second-order measurement target value, corresponding to a spatial distribution obtained by correcting the spatial distribution of the first-order measurement target value, by using the information of the spatial distribution of the first first-order phase value, the information of the spatial distribution of the second first-order phase value, and the information of the spatial distribution of the first-order measurement target value.
地址 Tokyo JP