LASER INDUCED THERMAL IMAGING APPARATUS AND LASER INDUCED THERMAL IMAGING METHOD USING THEREOF

摘要

According to an embodiment of the present invention, a laser thermal transfer apparatus includes: a nozzle part placed apart from a donor film in a vacuum chamber and discharges an inert gas to an upper surface of the donor film in the direction perpendicular to the upper surface of the donor film; a shielding film arranged on an upper part of the donor film to contact the donor film provided along an edge of the donor film; and additionally, a heating part located on the upper part of the donor film provided along an edge of the donor film. The distance from the heating part to the substrate is closer than the distance from the shielding film to the substrate.