| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card for exchange exchangeable easily by solving a conventional problem caused by heat during probe exchange. SOLUTION: This probe for exchange held by a probe hand mechanism when exchanging the probe is constituted of a mounting part to be mounted on an electrode of a probe card; an arm part extending from the mounting part; a tip part provided on the tip of the arm part, to be in contact with an electrode which is an inspection object, and a handling plate held by the probe hand mechanism. COPYRIGHT: (C)2009,JPO&INPIT |
