Rinsing apparatus and rinsing method for polycrystalline silicon lump

摘要

A rinsing apparatus for polycrystalline silicon lump which is obtained by cutting or breaking a rod of polycrystalline silicon, including: a wash basket having a plurality of through holes, which carries the polycrystalline silicon lump; a wash tank in which the wash basket is provided therein, in which rinse water is continuously supplied from a water supply port which is arranged at a bottom part of the wash tank; an inner cage having a plurality of openings which is smaller than the through holes of the wash basket at a bottom part thereof, provided in the wash tank, in which the wash basket is stored therein; and a swing device holding and swinging the wash basket in the inner cage, and: an overflow part which recovers the rinse water overflowed from an upper portion of the wash tank is provided at the wash tank.

主权项

1. A rinsing apparatus for a polycrystalline silicon lump which is obtained by cutting or breaking a rod of polycrystalline silicon, comprising:
a wash basket having a plurality of through holes, and carrying the polycrystalline silicon lump; a wash tank in which the wash basket is provided therein, and in which rinse water is continuously supplied from a water supply port which is arranged at a bottom part of the wash tank; an inner cage having a plurality of openings which is smaller than the through holes of the wash basket at a bottom part thereof, provided in the wash tank by resting a handle formed at an upper end of the inner cage on an upper part of the wash tank so as to be held in a state of being hung in the wash tank, and in which the wash basket is stored therein; and a swing device holding and swinging the wash basket in the inner cage, wherein an overflow part which recovers the rinse water overflowed from an upper portion of the wash tank is provided at the wash tank.