| 摘要 |
<p>PROBLEM TO BE SOLVED: To improve substrate tracking precision.SOLUTION: An image tracking device 1 includes: extraction means 22 for extracting a tracking region containing a part of a specific subject from a single frame image among a plurality of frame images inputted in time series; similarity calculation means (24, 25, 26) which output sets of similarity by calculating similarity between a tracking region and each comparison region extracted from a frame image that is different from said one frame image; and correction means (32, 33, 34) for correcting similarity. The correction means includes at least one of a first correction part which corrects the similarity set based on a value about distance of each comparison region from a position corresponding to a reference position and field angle at the time of generating the different frame image, and a second correction part for correcting the similarity set based on the direction of each comparison region from a position corresponding to a first position.</p> |
