PROCESS OF MANUFACTURING SEMICONDUCTOR SUBSTRATE AND SEMICONDUCTOR SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a process of manufacturing a semiconductor substrate for producing a light-emitting device.SOLUTION: The process of manufacturing a semiconductor substrate for a light-emitting device includes: a laminated structure layer formation process of forming a laminated structure layer in which a first material layer and a second material layer having mutually different refractive indices are alternately laminated in a plurality on a surface of a support substrate of polycrystalline SiC; and a bonding process of bonding a single crystal layer of single crystal SiC on a surface of the laminated structure layer.