DIFFERENTIAL PRESSURE FLOW SENSOR

摘要

A differential pressure flow sensor that includes a plurality of channels divided into multiple sets of channels having different characteristics. Primary channels establish fluid communication between an inlet and an outlet of the flow sensor. Secondary channels establish fluid communication between the inlet and a first pressure port, but not the outlet. Tertiary channels establish fluid communication between the outlet and a second pressure port, but not the inlet. Signals generated at the first and second pressure port are used to determine a rate of flow through of gas through the sensor. Due to the structural features of the device, the phase delay of individual oscillatory flow components compared to corresponding oscillatory pressure components remains substantially constant across a wide range of flow rates.

主权项

1. A device for measuring a differential pressure of a flow of gas between an inlet and an outlet, the device including:
a housing that forms a conduit between an inlet and an outlet; a first chamber defined in the housing; a second chamber defined in the housing; a first pressure port configured to fluidly communicate with the first chamber, and a second pressure port configured to fluidly communicate with the second chamber; and a flow body disposed within the housing, the flow body comprising a plurality of channels, the plurality of channels comprising: a plurality of primary channels disposed within the flow body, wherein the primary channels are configured to establish fluid communication between the inlet and the outlet, such that gas from the inlet that enters the primary channels primarily flows to the outlet, a set of secondary channels disposed within the flow body, wherein the set of secondary channels are configured to establish fluid communication between the inlet and the first chamber, such that gas from the inlet that enters the set of secondary channels primarily flows to the first pressure port through the first chamber, and a set of tertiary channels disposed within the flow body, wherein the set of tertiary channels are configured to establish fluid communication between the outlet and the second chamber, such that gas that enters the set of tertiary channels primarily flows to the second pressure port through the second chamber, wherein the primary channels do not include the secondary channels or the tertiary channels, the secondary channels do not include the primary channels or the tertiary channels, and the tertiary channels do not include the primary channels or the secondary channels.