发明名称 |
Transmission electron microscope, and method of observing specimen |
摘要 |
Provided is means which enables observation of the shape of a specimen as it is without deforming the specimen. Observation is made by allowing a specimen-holding member having an opening (for example, microgrid and mesh) to hold an ionic liquid and charging a specimen thereto, to allow the specimen to suspend in the ionic liquid. Furthermore, in the proximity of the specimen-holding member, a mechanism of injecting an ionic liquid (ionic liquid introduction mechanism) and/or an electrode are provided. When a voltage is applied to the electrode, the specimen moves or deforms in the ionic liquid. How the specimen moves or deforms can be observed. Furthermore, in the proximity of specimen-holding member, an evaporation apparatus is provided to enable charge of the specimen into the ionic liquid while evaporating. Furthermore, in the proximity of the specimen-holding member, a microcapillary is provided to charge a liquid-state specimen into the ionic liquid. Note that the specimen-holding member is designed to be rotatable. |
申请公布号 |
EP2801998(A2) |
申请公布日期 |
2014.11.12 |
申请号 |
EP20140002375 |
申请日期 |
2009.04.27 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
NAKAZAWA, EIKO;KOBAYASHI, HIROYUKI;KUWABATA, SUSUMU |
分类号 |
H01J37/20;G01N1/28;G01N1/40;G01N23/225;H01J37/26 |
主分类号 |
H01J37/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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