Back-illuminated solid-state image sensing element, method of manufacturing the same, and imaging device

摘要

In a back-illuminated solid-state image sensing element, the areas of the front surface sides of individual pixels are the same as one another, regardless of the colors of light components dispersed by filters and entering the individual pixels, and the areas of the rear surface sides of pixels which a dispersed red light component enters are larger than the areas of the rear surface sides of pixels which a green or blue light component enters.

主权项

1. A back-illuminated solid-state image sensing element comprising:
a semiconductor substrate in which a plurality of photodiodes are arranged in a two-dimensional array and each of the plurality of photodiodes is formed from a rear surface side into which light enters, to a front surface side; a color filter stacked on the rear surface side of the semiconductor substrate to disperse light; micro lenses stacked on a rear surface side of the color filter for the individual photodiodes to condense incident light such that the incident light enters rear surface sides of the corresponding photodiodes; and a signal reading unit formed on the front surface side of the semiconductor substrate to read acquired image signals detected by the photodiodes according to the amounts of received light components, wherein the areas of front surface sides of the individual photodiodes are formed to be the same as one another, regardless of colors of light components dispersed by the color filter and entering into the photodiodes, and the areas of rear surface sides of the photodiodes into which a dispersed red light component enters are formed larger than the areas of rear surface sides of the photodiodes into which a green or blue light component enters, wherein the areas of the rear surface sides of the photodiodes into which the green light component enters are formed larger than the areas of the rear surface sides of the photodiodes into which the blue light component enters.