发明名称 Selection transistor and method of fabricating the same
摘要 <p>Provided are a selection transistor and a method of fabricating the same. A selection transistor can be formed on an active region in a semiconductor substrate to include a gate electrode that includes recessed portions of a sidewall of the gate electrode which are recessed inward adjacent lower portions of the gate electrode to define a T-shaped cross section of the gate electrode. A tunnel insulating layer can be located between the gate electrode and the active region.</p>
申请公布号 KR101458957(B1) 申请公布日期 2014.11.10
申请号 KR20080057019 申请日期 2008.06.17
申请人 发明人
分类号 H01L27/115 主分类号 H01L27/115
代理机构 代理人
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