SCANNING MODULE, DETECTION DEVICE USING BESSEL BEAM, DETECTION PROBE, AND PROBE TYPE DETECTION DEVICE

摘要

A scanning module according to an embodiment of the present invention includes a first path shift part for shifting the path of an incident electromagnetic wave from a light source, a first drive part for moving the first path shift part so as to adjust the path of the electromagnetic wave, and a Bessel beam forming part for forming a Bessel beam on at least one part of an inspected object by means of the electromagnetic wave whose path is shifted by the first path shift part. A detection probe according to an embodiment of the present invention includes a light source for generating an electromagnetic wave, a path shift part for shifting the path of the incident electromagnetic wave from the light source, a Bessel beam forming part for forming a Bessel beam on at least one part of an inspected object by means of the electromagnetic wave whose path is shifted by the path shift part, a detection part for detecting the intensity of the electromagnetic wave from the inspected object, and a housing for receiving the light source, path shift part, Bessel beam forming part and detection part.