SOLID PRECURSOR-BASED DELIVERY OF FLUID UTILIZING CONTROLLED SOLIDS MORPHOLOGY

摘要

Apparatus and method for volatilizing a source reagent susceptible to particle generation or presence of particles in the corresponding source reagent vapor, in which such particle generation or presence is suppressed by structural or processing features of the vapor generation system. Such apparatus and method are applicable to liquid and solid source reagents, particularly solid source reagents such as metal halides, e.g., hafnium chloride. The source reagent in one specific implementation is constituted by a porous monolithic bulk form of the source reagent material. The apparatus and method of the invention are usefully employed to provide source reagent vapor for applications such as atomic layer deposition (ALD) and ion implantation.

主权项

1. A vaporizer comprising a vaporizer vessel adapted to hold a source reagent, said vaporizer being adapted for heating of said vaporizer vessel and the source reagent therein, to generate vapor deriving from said source reagent, said vessel defining an enclosed interior volume, and having at least one port, whereby vapor deriving from said source reagent is dischargeable from said interior volume of the vessel, said vaporizer comprising at least one protrusion element in the interior volume adapted to contact the source reagent therein, wherein the source reagent comprises a monolithic porous solid source reagent body.