发明名称 |
Optical positioning device |
摘要 |
<p>The optical position measuring device has scanning grids provided for generation of all incremental signals consisting of multiple blocks arranged periodically. Each grid section has a periodic grid structure, which affects a deflection of the beam of rays in multiple spatial directions. The resulted spatial directions of the grid sections are arranged differently in a block. Detector elements are arranged in the different spatial directions in a detection plane.</p> |
申请公布号 |
EP2085752(B1) |
申请公布日期 |
2014.11.05 |
申请号 |
EP20080171105 |
申请日期 |
2008.12.09 |
申请人 |
DR. JOHANNES HEIDENHAIN GMBH |
发明人 |
HERMANN, MICHAEL;SÄNDIG, KARSTEN |
分类号 |
G01D5/38 |
主分类号 |
G01D5/38 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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