| 摘要 |
PROBLEM TO BE SOLVED: To provide a magnetic field detection device which measures an absolute value of a magnetic field with high precision and high resolution, regardless of a size of a magnetic material sample and a change in surface height of the magnetic material sample due to movement. SOLUTION: The magnetic field detection device comprises: a probe head 40 mounted on a holder base 37 to detect a magnetic field of a magnetic material sample 5; a fine motion unit 35 for moving the holder base 37 in two directions parallel to the magnetic material sample 5; a Zm driving system 21 for moving the probe head 40 in the vertical direction to the magnetic material sample 5; an external-magnetic-field generator 50 for generating a known magnetic field; a single-axis driving mechanism 30 for moving the probe head 40 into the known magnetic field of the external-magnetic-field generator 50; and a write element for applying a magnetic field to the magnetic material sample 5. The probe head 40 has a protrusion on a surface facing the magnetic material sample 5. A read element is provided on the protrusion. A DLC film is formed over a surface of the protrusion. The probe head 40 is mounted on the holder base 37 via a flexible support structure. The holder base 37 is connected to the fine motion unit 35 via a holder arm 36. COPYRIGHT: (C)2013,JPO&INPIT |
