摘要 |
The present invention relates to a MEMS microphone. The MEMS microphone includes an internal circuit board having a board sound hole, a MEMS chip, an internal cover, an external board, an external cover, a cover sound path formed between the external cover and the internal cover, and a separation member which is fixed between the internal circuit board and the external board and separates the same. An external sound received through an external sound hole passes through the cover sound path, passes through a space between the internal circuit board and the external board, and enters the internal space of the MEMS through the substrate sound hole. |