| 发明名称 |
FORMULATIONS FOR THE REMOVAL OF PARTICLES GENERATED BY CERIUM-CONTAINING SOLUTIONS |
| 摘要 |
Compositions and methods for removing lanthanoid-containing solids and/or species from the surface of a microelectronic device or microelectronic device fabrication hardware. Preferably, the lanthanoid-containing solids and/or species comprise cerium. The composition is preferably substantially devoid of fluoride ions. |
| 申请公布号 |
US2014318584(A1) |
申请公布日期 |
2014.10.30 |
| 申请号 |
US201213978825 |
申请日期 |
2012.01.12 |
| 申请人 |
Cooper Emanuel I.;Barnes Jeffrey A. |
发明人 |
Cooper Emanuel I.;Barnes Jeffrey A. |
| 分类号 |
H01L21/02 |
主分类号 |
H01L21/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method of removing lanthanoid-containing solids and/or species from the surface of a microelectronic device or microfabrication hardware, said method comprising contacting the surface with a composition that substantially dissolves the lanthanoid-containing solids and/or species present on the surface. |
| 地址 |
Scarsdale NY US |
