ELECTROMAGNETIC WAVE DETECTOR WITH IMPROVED WAVELENGTH SELECTION PROPERTY

摘要

In order to improve efficiency for converting electromagnetic energy into heat energy, an electromagnetic wave detector detecting an electromagnetic wave having a specific wavelength includes a substrate in which a read-out circuit is formed; a temperature detecting portion with a space from the substrate and which includes a bolometer thin film and a first antenna wire; a supporting portion which supports the temperature detecting portion with a space from the substrate and which includes electrode wires connected to the read-out circuit and to the bolometer thin film; and a reflecting portion which is provided to the substrate and which reflects the electromagnetic wave penetrating the temperature detecting portion toward the temperature detecting portion.

主权项

1. An electromagnetic wave detector configured to detect an electromagnetic wave having a specific wavelength, comprising:
a substrate in which a read-out circuit is formed; a temperature detecting portion disposed with a space from said substrate, said temperature detecting portion including a bolometer thin film and a first antenna wire; a supporting portion configured to support said temperature detecting portion with a space from said substrate, said supporting portion including electrode wires which are connected to said read-out circuit and to said bolometer thin film; and a reflecting portion provided to said substrate, said reflecting portion reflecting the electromagnetic wave penetrating said temperature detecting portion toward said temperature detecting portion.