发明名称 |
METHOD FOR MANUFACTURING HIGH QUALITY GRAPHENE USING CONTINUOUS HEAT TREATMENT CHEMICAL VAPOR DEPOSITION METHOD |
摘要 |
Provided is a method of forming graphene having an increased grain size. In the method, a substrate including a catalyst layer formed of a transition metal is loaded into a chamber and a gaseous carbon source is supplied into the chamber. A continuous heat treatment in which the catalyst layer is locally heated while moving a heated area of the catalyst layer is performed to dissolve a carbon component in the catalyst layer and extract graphene on a surface of the catalyst layer from the dissolved carbon component. |
申请公布号 |
EP2706130(A4) |
申请公布日期 |
2014.10.29 |
申请号 |
EP20120779850 |
申请日期 |
2012.03.15 |
申请人 |
KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY |
发明人 |
JEON, SEOK-WOO;LEE, JIN-SUP;OH, SE-RAN |
分类号 |
C01B31/04;C23C16/26;C23C16/44;C23C16/46 |
主分类号 |
C01B31/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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