| 摘要 |
<p>A magnetron coating apparatus 2 comprises a magnetron assembly 16 having a targeting 20 forming an internal face of the magnetron assembly and an inner shield 30 to the rear of the magnetron assembly. A housing or outer shield 32 encloses the external face of the magnetron assembly. The inner and outer shields may prevent leakage of RF radiation when the magnetron is used with an RF power supply. Additional shielding plates forming part of the side walls of the chamber may be provided and held in position by male and female engagement means for easy removal. The side walls of the apparatus may comprise inner and outer walls which form a cavity for a cooling fluid. A trolley with guide rails may be used to move a jig 6 and substrates into and out of the chamber 8. The magnetron assembly may be removed as an integral unit when changing the magnetron assembly by removing the housing 32.</p> |
