| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a coating unit and a pattern correction device capable of carrying out the retraction of a dummy coating member and the lowering of a coating means promptly with a simple structure. <P>SOLUTION: This coating unit 19 includes: a driving device 47 which inserts a dummy coating plate 36 between a coating part 20 and a substrate 1 at the time of dummy coating action, and retracts the dummy coating plate 36 from between the coating part 20 and the substrate 1 after finishing the dummy coating action; and an X table 43 (a profiling mechanism) which elevates the coating part 20 according as the dummy coating plate 36 is inserted, and lowers the coating part 20 according as the dummy coating plate 36 is retracted. Therefore, the retraction of the dummy coating plate 36 and the lowering of the coating part 20 can be carried out promptly with a simple structure. <P>COPYRIGHT: (C)2011,JPO&INPIT |
