| 摘要 |
PROBLEM TO BE SOLVED: To perform a treatment, while accurately measuring the actual temperature of a workpiece, when the workpiece is stored inside a chamber and heated.SOLUTION: In a treatment apparatus 1 for performing a modification treatment to a workpiece W stored inside a chamber 2, a measurement piece 6 thermally expanded/contracted by an influence of the inside temperature of the chamber 2 is provided inside the chamber 2, and further a measurement part 8 for measuring the actual temperature of the workpiece W by measuring a thermally expanded/contracted amount of the measurement piece 6 is provided. |
