SEMICONDUCTOR CHARACTERISTICS MEASURING DEVICE ALLOWING FOR ELECTRONIC RECOMBINATION

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor characteristics measuring device capable of electronically recombining an auxiliary circuit.SOLUTION: The semiconductor characteristics measuring device includes: an arbitrary electronic element; a switch array 13 including switches each provided on an intersection of a plurality of wires formed in a lattice shape; a probe needle 56 brought into contact with a pad of a semiconductor chip as a measuring object, and electrically connecting the switch array 13 and the semiconductor chip; a switch driver 12 connected so as to be able to receive an input signal from a computer, and optionally changing over the combination of an on/off state of the arranged switches according to the input signal; and an output unit outputting a signal outputted from the semiconductor chip to a tester for measuring electric characteristics of the semiconductor chip.