| 摘要 |
PROBLEM TO BE SOLVED: To provide a processing device in which an annular frame can be surely held by a holding part of export means even when the annular frame of a frame unit inserted into a cassette is bent.SOLUTION: The processing device comprises: a chuck table for holding a frame unit 17 to which a plate-like object to be processed is fixed via an adhesive tape; and processing means for processing the object to be processed in the frame unit. The processing device further comprises a position detection sensor 44 for detecting a position of an annular frame of each frame unit accommodated in a cassette 18 mounted on a cassette pedestal 16. The position detection sensor is disposed to face the center of an opening of the cassette in a width direction and, while moving in a perpendicular direction relatively to the cassette, detects the position of the annular frame in the perpendicular direction in the center portion of the cassette of each frame unit in the width direction. In accordance with the detected position, control means controls either elevation means or export means and inserts a holding part 40 of the export means into the cassette, and the annular frame is held by the holding part. |
