| 摘要 |
FIELD: nanotechnologies.SUBSTANCE: invention relates to a technology for obtaining nanodimensional films of multiferroics and can be used in production of high-quality magneto-optic information processing and storage devices, magnetic sensors, capacitive electromagnets, magnetoelectric storage elements and non-mutual microwave filters. The method involves manufacture of a target of the specified composition, processing of a monocrystalline substrate with argon ions, spraying of the target onto the substrate with further annealing of the obtained film; with that, a strontium titanate substrate is used; the spraying process is performed onto the substrate heated up to 700-750°C; controlled flow of oxygen ions is supplied to the substrate area, and the obtained films are annealed in oxygen environment during 1.0 hour at the temperature of 500-550°C and standard atmospheric pressure.EFFECT: invention allows obtaining monocrystalline nanodimensional films of multiferroics with BiFeOand RBiFeOcomposition (where R- Nd, La, Pr in the quantity of 0,1-0,3 form units).1 tbl, 1 ex |
