发明名称 FREQUENCY ADJUSTMENT METHOD OF VIBRATION PIECE, METHOD OF MANUFACTURING VIBRATOR, VIBRATION PIECE, OSCILLATOR, ELECTRONIC APPARATUS AND MOBILE
摘要 <p>PROBLEM TO BE SOLVED: To provide a frequency adjustment method of a vibration piece capable of fine-tuning of the resonance frequency easily, a method of easily manufacturing a vibrator vibrating at a desired resonance frequency, a vibration piece adjustable to a desired resonance frequency, a highly reliable oscillator including such a vibration piece, an electronic apparatus and a mobile.SOLUTION: A frequency adjustment method of a vibration piece adjusts the resonance frequency of a vibration piece 190 by performing oxidation processing for the vibration piece 190 having a piezoelectric substrate (vibration substrate) 191, a pair of electrode layers 193, 195 having conductivity provided on the upper surface of the piezoelectric substrate 191, and mass portions 21, 22 (oxidized layer) containing an oxidized material provided on the surface of the electrode layers 193, 195, thereby causing an increase in mass due to oxidation of the mass portions 21, 22.</p>
申请公布号 JP2014200040(A) 申请公布日期 2014.10.23
申请号 JP20130075325 申请日期 2013.03.29
申请人 SEIKO EPSON CORP 发明人 WADA MITSUHIRO
分类号 H03H3/04;H03B5/32;H03H3/02;H03H9/19;H03H9/215 主分类号 H03H3/04
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