| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a gas scanning electron microscope which allows for easy creation of an enlarged image of the surface of a sample arranged in gas.SOLUTION: A gas scanning electron microscope comprises: a lens barrel constituted at least of an electron gun, a condenser lens, an objective lens, scanning means and a detector; an adjustment mechanism for keeping in non-contact between a vacuum partition wall arranged between the lens barrel and a sample in gas, a portion facing the vacuum partition wall provided in contact with the lens barrel or the sample side thereof, and the sample arranged in gas; a detector for detecting secondary electrons discharged when performing plane scanning, while irradiating the sample arranged in gas with an electron beam emitted from the lens barrel into the gas while transmitting through the vacuum partition wall, or the reflection electrons or an X-ray generated, by taking into the vacuum in the lens barrel while transmitting through the vacuum partition wall; and image creation means for creating an image based on the signal of secondary electrons, or reflection electrons or an X-ray detected by the detector, or a current flowing through the sample.</p> |
