METHOD OF FABRICATING MULTI-BAND FILER MODULE

摘要

A method of fabricating a multi-band filter module is provided. The method includes forming a Film Bulk Acoustic Resonator (FBAR) on a piezoelectric substrate by forming a resonant part on the piezoelectric substrate and then an air gap recessed on a surface of the piezoelectric substrate and positioned under the resonant part; and forming a Surface Acoustic Wave (SAW) device on the piezoelectric substrate in which the steps of forming the FBAR and the SAW are concurrently performed.

主权项

1. A multi-band filter module comprising:
a substrate; a first filter to operate in a first frequency band and including a resonant part electrically coupled with the substrate and including a first electrode, a second electrode, and a piezoelectric film formed between the first and second electrodes; and a second filter to operate in a second frequency band lower than the first frequency band.