MEMS Device with Asymmetric Flexures

摘要

A microelectromechanical systems (MEMS) device includes a scanning platform suspended from a fixed platform by two flexures that form a pivot axis. The two flexures may be symmetric or asymmetric about a centerline of the scanning platform. At least one flexure includes two segments that are not parallel to each other. A second flexure may include two segments with one segment being wider than the other. Flexure design reduces effects of mounting and thermal stresses when the MEMS device is mounted as part of an assembly.

主权项

1. A microelectromechanical system (MEMS) device comprising:
a fixed platform; a scanning platform; and first and second flexures coupling the scanning platform to the fixed platform, the first and second flexures forming a pivot axis, wherein the first and second flexures are asymmetric about a centerline of the scanning platform orthogonal to the pivot axis.