FLOW SENSORS WITH MODULAR MICROFLUIDIC CHANNELS AND METHODS OF MANUFACTURE

摘要

Modular microfluidic channel structures for conducting liquid from a reservoir include a sensor for monitoring a parameter (such as flow rate or pressure) relating to liquid flowing therethrough. The microfluidic channel generally comprises a thermally insulating substrate made of one or more materials such as, e.g., glass, fused silica, parylene, and/or silicone.

主权项

1. A a microfluidic flow channel comprising:
an electrically and thermally insulating substrate; on the substrate, circuit components including at least one sensor element, at least two resistive elements electrically connected thereto and at least two contact pads each electrically connected to one of the resistive elements, the at least one sensor element being disposed within a channel region of the substrate; disposed on the circuit components, a dielectric layer; and disposed on the substrate, at least one layer defining (i) a well over the channel region of the substrate, (ii) at least two apertures overlying the channel region, and (iii) a pair of receiving pockets each configured for receiving a fluid conduit therein, the receiving pockets each configured for receiving a fluid conduit therein, the receiving pockets fluidically communicating with the channel region but not directly with each other.