INTEGRATED CIRCUIT SYSTEM WITH NON-VOLATILE MEMORY AND METHOD OF MANUFACTURE THEREOF

摘要

An integrated circuit system and a method for manufacturing the same are provided. The integrated circuit system comprises: an integrated circuit die which has an address switch; a lower electrode contact which has characteristics of a chemical vapor deposition or an atomic layer deposition, is coupled to the address switch, and is halogen-free; a transition material layer which is disposed just above the lower electrode contact; and an upper electrode contact which is disposed just above the transition material layer to form a non-volatile memory array on the integrated circuit die.