| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a transparent conductive thin film capable of reducing manufacturing cost of a touch screen while improving a touch position detection performance of a touch screen. <P>SOLUTION: A transparent conductive thin film 4 is formed of a material having a rate of change of an electrical resistance against stress of 300 or more. Specifically, the transparent conductive thin film 4 is formed of ZnO having a composition ratio of Zn:O within a range from 37.21:62.79 to 37.69:62.31. The transparent conductive thin film 4 is produced by introducing argon at a flow rate of 18.0 cm<SP POS="POST">3</SP>/min into a vacuum chamber with a glass substrate 2 and a target containing Zn as a component are arranged in the vacuum chamber and sputtering the target while introducing oxygen at a flow rate of 1.0 cm<SP POS="POST">3</SP>/min or more and 2.0 cm<SP POS="POST">3</SP>/min or less. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
